Vacuum Systems-Residual Gas Analysis

Residual Gas Analysis

    Microvision MKS Plus Mass Spectrometer

  • 0-200 amu measurement capability
  • Quadrupole mass spectrometer
  • Electron impact ionization
  • Leak valve sample introduction
  • Differential gas flow sample introduction
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    Hewlett Packard 5950 A ESCA Spectrometer w/ Residual Gas Analysis (RGA) attachment

  • Monochromatic Al anode source
  • Surface elemental (>Li) and chemical analysis (top 1-2nm of solids), thin films and powders
  • Argon sputtering for surface cleaning and depth profiling (0-50nm)
  • Residual gas analysis by quadrupole mass spectrometry