Surface Analysis

Scanning Electron Microscopy

JEOL JSM-6460 LV with Energy Dispersive Spectroscopy

  • 50X-50,000X magnification
  • Tungsten filament
  • Variable pressure vacuum system (5×10^-6 to 2.0 Torr)
  • Three segment solid state backscattered electron detector
    • Composition mode imaging
    • Topography mode imaging
    • Shadow mode imaging
  • Large¬†specimen chamber with 5-axis motorized stage
  • Tungsten filament scanning electron microscope
  • Energy Dispersive Spectroscopy (EDS) detector
  • 50X-10,000X magnification
  • X-Y-Z stage with rotation
  • Elemental analysis down to carbon (measures top 1-4microns of surface)
  • EDS line scan and mapping capabilities

X-ray Photoelectron Spectroscopy

Perkin-Elmer PHI 5440 ESCA System

  • Mg anode
  • Ar ion gun for sample surface cleaning and depth profiling
  • Surface elemental (>Li) and chemical analysis (top 1-2nm of solids), thin films and powders

Hewlett Packard 5950 A ESCA Spectrometer

  • Monochromatic Al anode source
  • Surface elemental (>Li) and chemical analysis (top 1-2nm of solids), thin films and powders
  • Argon sputtering for surface cleaning and depth profiling (0-50nm)

Atomic Force Microscopy

Agilent 5420 AFM

  • Surface topography (dry or in liquids)
  • Z-resolution <1nm (range sub nm to 2micrometers)
  • Maximum 50micron x 50 micron lateral scan window
  • Contact mode
  • intermittent contact (tapping) mode
  • Force modulation microscopy (FMM)
  • Lateral force microscopy (LFM)
  • Current sensing mode (CSAFM)
  • Magnetic force microscopy (MFM)

3-D Laser Confocal Microscopy

Olympus LEXT OLS4100

  • Laser scanning non-contact microscope for 3D imaging
  • 405nm semiconductor laser with photomultiplier detector
  • Total magnification: 108x – 2,000x
  • Polarizing plate
  • 100mm x 100mm motorized stage
  • Surface feature observation at 20nm resolution
  • Image stitching capability for high resolution over wide lateral area

Spectroscopic Ellipsometry

Horiba Jobin Yvon / UVISEL

  • Resolution better than 3nm
  • Combined Halogen and Blue LED light source
  • 450nm to 1000nm Spectra range
  • Sample size up to 200mm
  • Angle of incidence 45 to 90 degree by step of 5 degree
  • Manual 17mm height adjustment and tilt
  • Measurement time 1 to 10 sec